作者单位
摘要
中国科学技术大学 工程科学学院,安徽合肥230027
下一代大规模光谱巡天测量项目,需要更小尺寸和高精度的光纤定位单元。本文提出了R-θ形式光纤定位单元的R机构精定位部分设计方案,通过使用叠堆式压电陶瓷并结合柔性铰链式杠杆位移放大机构,实现了R机构精定位部分的位置精度。为了尽量减小迟滞非线性对精定位精度的影响,采用经典的Preisach模型建立了放大后输出位移的驱动模型,并在此基础上进行了相应的优化。最终建立的精定位位移模型的平均误差在4 μm以内,相比于最大40 μm的非线性误差,误差得到了大幅度下降。实验结果表明,通过Preisach模型所建立的位移模型进一步提高了精定位的定位精度,满足了精定位的误差设计需求,同时也为后期粗定位留下了更大的设计空间。
光纤定位单元 压电陶瓷 放大机构 精定位 Preisach模型 fiber positioning unit piezoelectric ceramics magnifying mechanism fine positioning Preisach model 
光学 精密工程
2022, 30(18): 2205
Author Affiliations
Abstract
1 Key Laboratory of Precision Scientific Instrumentation of Anhui Higher Education Institutes, CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, People’s Republic of China
2 Institute of Tribology, Hefei University of Technology, Hefei 230009, People’s Republic of China
3 School of Instrument Science and Opto-Eelectronics Engineering, Hefei University of Technology, Hefei 230009, People’s Republic of China
Femtosecond laser direct writing (FLDW) has been widely employed in controllable manufacturing of biomimetic micro/nanostructures due to its specific advantages including high precision, simplicity, and compatibility for diverse materials in comparison with other methods (e.g. ion etching, sol-gel process, chemical vapor deposition, template method, and self-assembly). These biomimetic micro/nanostructured surfaces are of significant interest for academic and industrial research due to their wide range of potential applications, including self-cleaning surfaces, oil-water separation, and fog collection. This review presents the inherent relationship between natural organisms, fabrication methods, micro/nanostructures and their potential applications. Thereafter, we throw a list of current fabrication strategies so as to highlight the advantages of FLDW in manufacturing bioinspired microstructured surfaces. Subsequently, we summarize a variety of typical bioinspired designs (e.g. lotus leaf, pitcher plant, rice leaf, butterfly wings, etc) for diverse multifunctional micro/nanostructures through extreme femtosecond laser processing technology. Based on the principle of interfacial chemistry and geometrical optics, we discuss the potential applications of these functional micro/nanostructures and assess the underlying challenges and opportunities in the extreme fabrication of bioinspired micro/nanostructures by FLDW. This review concludes with a follow up and an outlook of femtosecond laser processing in biomimetic domains.
femtosecond laser direct writing multiscale micro/nanostructures extreme fabrication bioinspired applications 
International Journal of Extreme Manufacturing
2020, 2(3): 032002
Author Affiliations
Abstract
1 CAS Key Laboratory of Mechanical Behavior and Design of Materials, Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
2 e-mail: jwl@ustc.edu.cn
3 e-mail: dongwu@ustc.edu.cn
Manipulating Airy beams to symmetric Airy beams (SABs) with abruptly autofocusing and self-accelerating properties has attracted much attention. With such a particular propagation dynamic, SABs may provide great potential in dynamic signal imaging. On the other hand, the generation of SABs by spatial light modulators suffers from the limitations of phase gradient accuracy, low optical efficiency (<40%), and a bulky footprint. Therefore, exploring imaging applications and optimal generation methods of these Airy-type beams deserves further research. Here, based on the coordinate transformation of SAB, an asymmetric Airy beam (AAB) is realized. Symmetric/asymmetric cubic phase microplates (SCPPs/ACPPs) are designed and fabricated for generating SAB/AAB. The SCPP/ACPP demonstrates superior performance: compact construction (60 μm×60 μm×1.1 μm), continuous variation of phase, high efficiency (81% at 532 nm), and broadband operation from 405 to 780 nm. Dynamic imaging under monochromatic and polychromatic lights is realized by the SAB/AAB, indicating various results at different propagation distances with a certain initial signal. Further investigation reveals that the SCPP on a soft substrate maintains its physical dimensions and optical properties unchanged during stretching. Our work enables wide potential applications in integrated optics, beam manipulation, and imaging.
Photonics Research
2020, 8(6): 06000875
作者单位
摘要
1 中国科学技术大学 精密机械与精密仪器系, 合肥 230026
2 中国科学院 国家天文台 南京天文光学技术研究所, 南京 210042
3 中国科学院 天文光学技术重点实验室, 南京 210042
根据多镜面地基望远镜在近红外实现共相衍射极限成像的需求,提出了一种基于压电堆栈致动器的高分辨率倾斜镜设计方案。该方案以哑铃型柔性铰链和菱形位移缩小结构(RADS)作为倾斜镜的运动传递元件,压电堆栈致动器(PSA)作为动力元件,并使用电涡流传感器作为角度测量部件。介绍了高分辨倾斜镜的工作原理,并对哑铃型柔性铰链和菱形位移缩小结构进行设计。柔性铰链和位移缩小结构的关键结构参数均采用理论计算、实验和仿真进行优化。建立倾斜镜模型,利用理论计算和有限元仿真软件分别计算倾斜镜的倾斜角度和分辨率。实验结果表明:设计的倾斜镜角度分辨率达到0.017″,最大倾斜角度为14.6″,谐振频率为136.97 Hz,与有限元仿真结果相吻合,满足地基望远镜系统衍射极限成像的要求。
倾斜镜 高分辨率 压电堆栈致动器 地基望远镜 柔性铰链 tip/tilt mirror high angular resolution piezoelectric stack actuator ground-based telescope flexible hinge 
强激光与粒子束
2018, 30(7): 074102
Author Affiliations
Abstract
1 Faculty of Mechanical Engineering and Mechanics, Ningbo University, Ningbo 315211, China
2 Zhejiang Provincial Key Lab of Part Rolling Technology, Ningbo 315211, China
3 Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230027, China
Adaptive optics (AO) systems greatly improve the resolution of retinal imaging instruments by actively correcting ocular aberrations. In this Letter, closed-loop correction as well as ocular aberration compensation of a 62-element silicon unimorph deformable mirror (DM) driven by only positive voltage is performed. The experimental results show that the root-mean square (RMS) wavefront of the initial mirror surface is reduced to 0.011 μm in a closed-loop AO system. The DM reproduces Zernike shapes from the third to 35th mode accurately. The simulated compensation of 200 ocular wavefronts shows that the average RMS value after correction is reduced to 0.017 μm.
220.1080 Active or adoptive optics 170.4470 Ophthalmology 220.1000 Aberration compensation 
Chinese Optics Letters
2015, 13(4): 042201
Author Affiliations
Abstract
Department of Precision Machinery and Precision Instrumentation, University of Science and Technology of China, Hefei 230026, China
Micro stereo lithography is a kind of technology utilizing the solidified effect that photo curable polymer will appear under ultraviolet (UV) laser exposure. It is widely used in three-dimensional (3D) micro fabrication. We get the experimental values of a pair of UV laser curing coefficients, absorption coefficient and critical curing energy, of curable resin by fitting the calculation results of the Gaussian beam theory and experimental curing results. The theoretical relation between the curing unit’s shape and the exposure features of time and intensity of convergent Gaussian beam is presented. The calculation and experimental results of curing unit under different conditions agree well with each other. This research offers a steady base for further research about the improvement of resolution.
微细光成型模拟固化单元 220.3740 Lithography 220.4000 Microstructure fabrication 220.4610 Optical fabrication 
Chinese Optics Letters
2009, 7(8): 08724

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